Analytical Equipment

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The Analytical Lab (ENRC 4308 ) houses metrology, machining and cross-sectioning tooling for post evaluation of substrates and modules developed in either the LTCC or power assembly laboratory. Tom Cannon would be the main contact for details, training and access to the tools in this facility.

SIEG 3501 CNC Milling Machine

The model 3501 is a full CNC milling machine that provides three axis machining and even includes a 4th axis driver so you can add a 4th axis rotary table by simply plugging it in. This model can achieve positioning accuracy to 0.0005″. It will machine at up to 20 inches per minute and rapid traverse at up to 80 inches per minute. With a work envelope of 10.2″ (X-axis) x 4.3″ (Y-axis) x 7.1″ (Z-axis) the model 3501 has large capabilities in a small machine.

Cost: $10/hour (academic)

Specifications Units
Drawbar Thread 3/8″-16
T-slots 3 slots 0.31″ (8.0 mm) wide
Positioning Accuracy 0.0004″ (0.010 mm)
Face Milling Capacity 0.8″ (20 mm)
Spindle Torque at 1500 RPM 255 oz-in (1.80 N*m)
Rapid Travel Maximum 79 in/min (2000 mm/min)
X-Axis Travel 10.2″ (260 mm)
Table Size 15.1″ x 5.4″ (384 mm x 137 mm)
Y-Axis Travel 4.3″ (110 mm)
Ball Screws 12 mm (0.47 in) dia. x 4 mm pitch class 5 ground
Feed Speed Maximum 20 in/min (500 mm/min)
Drilling Capacity 0.4″ (10 mm)
End Milling Capacity 0.4″ (10 mm)
X-Axis & Y-Axis NEMA 23 Motors  
Throat 5.1″ (130 mm)
Z-Axis Travel 7.1″ (180 mm)
Spindle Taper 2 Morse taper
Spindle Bearings ABEC 5 angular contact
Spindle Speed 100 – 7000 RPM
Spindle Motor Brushless DC 0.67 hp (500 Watts)
Z-Axis NEMA 23 Motor 191 oz-in (1.35 Nm)

Nordson Dage 4000 Multipurpose Bondtester

The Model 4000 bondtester is multipurpose, capable of performing all pull and shear applications. The 4000 bondtester can be configured as a simple wire pull tester and upgraded to provide ball shear, die shear, bump pull, vectored-pull, or tweezer pull tests. The die shear and wire pull tester modules are currently available for use.

Cost: $20/hour (academic)

Specifications Units
X, Y axis accuracy +/-10 microns over 50 mm
Die shear temperature 400°C
Die shear tool 15.24 mm wide
Z axis travel 65 mm
X, Y axis resolution < 1 microns
Z axis maximum test speed 5 mm/sec.
X, Y maximum speed 2 mm/sec
Z axis accurace over full travel +/- 10 microns
Z axis resolution +/- 0.125 microns
X, Y axis repeatability +/-5 microns over 50 mm
Z axis accuracy over 2 mm +/- microns
X axis maximum force 5 kg
Z axis maximum force 10 kg pull at 5 mm/sec., 10 kg push at 2.5 mm/sec.
Z axis maximum speed 7 mm/sec.
Workholder working envelope X (220 mm), Y (220 mm), Z (50 mm)
Die shear test 100 kg, 40 kg
Y axis maximum force 100 kg
Wire pull cartridge 1 kg, 500 g, 250 g
Stepped jaw vice range 0.75″ (20 mm) to 4.25″ (110 mm)

Buehler Ecomet4 Polisher with Automet 2 Powerhead

polisher

The EcoMet 4 is a variable speed grinder-polisher with a 305 mm aluminum platen. The contols are easy to use with a touch-pad front panel and comes with an AutoMet2 power head that allows semi-automatic sample preparation.

Cost: $10/hour (academic)

Specifications Units
Platen size 300 mm
Speed 50 to 500 rpm
Utilities Water jet

Dektak 3030 profilometer

Dektak-3030

The Dektak 3030 an accurate 2D surface height and roughness measurements in the sub-micron range using a diamond tip. Measurements include average roughness, maximum height, average height, delta average step height and integrated area of the profile between the reference and measurement cursors. Data extraction is via printouts from the attached printer.

Cost: $10/hour (academic)

Specifications Units
Resolution 1000 Angstroms
Scan length 50 mm
Max. height 131 microns
Measure options Height, roughness
Stylus force 1 to 40mg
Maximum sample thickness 45mm (1.75 inches)

Equipment Tutorial:

DEKTAK 3030 Profilometer

Despatch LEY1-55H Series Humidity Environmental Test Chamber

humidity

The Despatch LEY series environment test chamber has the capabilities to simulate high/low temperatures as well as varying humidity conditions. The chamber includes a single stage mechanical refrigeration system, open element electric heater, a steam generator, a dehumidifying coil and a propeller fan for controller the environment within the chamber.

Cost: $5/hour (academic)

Specifications Units
Humidity capability 20 to 95% RH
Interior volume 0.1557 m3
Cooling rate (25 to -16°C) 11.5 min
Inside dimensions 51cmW x 51cmD x 61cm H
Heating rate (25 to 121°C) 13.5 min
Temperature range -30°C to 177°C

Anatech Hummer VI-A SEM Sputter Coater

The Anatech Hummer VI-A sputter coater is a table top sputter system designed to coat specimens with a thin conductive film of metal (Au, Pt) prior to being analyzed in an SEM or TEM.

Cost: $10/hour (academic)

Specifications Units
Ultimate pressure <20mTorr
Operating pressure ~80mTorr
Plasma current 15mA
Process gas Argon
Deposition rates  
Gold 4.5nm/min
Platinum 2.2nm/min
Palladium 1.9nm/min
Silver 3nm/min

Equipment Tutorial:
Anatech Hummer Vi-A SEM Sputter Coater

Sonix UHR2001 Scanning Acoustic Microscope

sonix

The Sonix UHR 2001 Scanning acoustic microscope is capable of detecting delamination, cracks and voids within boards, encapsulated electronic components and attached bare die. Samples are immersed in water with a transducer that sends an ultrasonic sound into a sample and senses the resulting echo. The lower (5 & 15 MHz) probes show less detail, but penetrates to greater depth. The standard 75 MHz probe cannot probe as deep, but provides the greatest detail..

Cost: $30/hour (academic)

Specifications Units
Frequency range 5, 15, 75 and 110MHz
Step size 5 micron
Scan mode Pulse-Echo
Travel range 315mm x 160mm

Tormach 1100M CNC Milling Machine

Tormach-CNC

The Tormach 1100M is a full CNC milling machine that provides three axis machining. This model can achieve positioning accuracy to 0.0005″. . It will machine at up to 20 inches per minute and rapid traverse at up to 80 inches per minute. With a work envelope of 457mm (X-axis) x 279mm (Y-axis) x 412.8mm (Z-axis).

Cost: $60/hour (academic)

Specifications Units
T-slots 3 slots 0.62” (15.9mm) wide
Table size 34” x 9.5” (864mm x 241mm)
X-axis travel 18” (457mm)
Y-axis travel 11” (279mm)
Feed speed maximum 110 in/min (2794 mm/min)
Spindle taper R8
Spindle speed Up to 7,500 RPM
Spindle motor 2.0 hp (1491 Watts)